TRI Austin has trained and certified in-house experts and equipment for surface examination, including Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), Optical Stereo Microscopy, Focussed Ion Beam Scanning Electron Microscopy, Micro-Raman Spectrometry, and Optical Profilometry.  These personnel and equipment are available as surface examination services in addition to being used for in-house needs.

Surface Examination Capabilities

• TRI Austin’s surface examination capabilities include:
• Scanning Electron Microscopy (SEM)
• Atomic Force Microscopy (AFM)
• Optical Stereo Microscopy
• Focussed Ion Beam Scanning Electron Microscopy
• Micro-Raman Spectrometry
• Optical Profilometry

Scanning Electron Microscope (SEM)

• Jeol 6390 SEM
• Magnification ~300,000x
• Resolution of ~1nm
• Specimen chamber: Up to 6” diameter
• Auto focus/auto stigmator, auto gun (saturation, bias, and alignment), and automatic contrast and brightness
• EDAX Element EDS with 30mm detector crystal

Atomic Force Microscope (AFM)

• Park Scientific AutoProbe CP-R AFM
• Manual XY stage and motorized Z stage
• 5 microns scanner
• 100 micrometers piezo scanner with a maximum vertical range of 2.5 microns
• Operates in contact and LFM mode , also tapping mode, and other AC techniques
• Coated Sharpened Microlevers  MSCT-MT-A sensors

Microscope

• Olympus BX51 Microscope
• Vertical stage movement: 25mm stage stroke with coarse adjustment limit stopper
• Torque adjustment for coarse adjustment knobs
• Stage mounting position variable
• High sensitivity fine focusing knob (minimum adjustment gradations: 1μm
• Built-in Koehler illumination for transmitted light
• 12V100W halogen bulb (pre-centered) Built-in filters (LBD-IF, ND6, ND25 optional)

Optical Stereomicroscope

• Leica M205A Stereomicroscope
• Fully automated
• 16:1 Zoom
• Structural detail resolution down to 476nm
• Numerical aperture of 0.35
• Resolution down one micrometer with 61.55mm working distance
• Indexed stage allows large area stitching and precise position measurements

Focussed Ion Beam Scanning Electron Microscopy

• Scios 2 HiVac FIB/SEM with EBL
• Resolution:  0.8 nm at 30keV in STEM
• Voltage:  200eV to 30 keV
• Current: 1 pA to 400nA
• Stage: 110 x110 mm with 65 mm z-travel, 360° rotation,
  -15° to 90° tilt
• NICol SEM column with Shottky emitter source
• Can do FIB milling of samples
• EDS and EBSD detectors

Micro-Raman Spectrometry

• Witec Alpha 300 Raman Spectrometer
• Confocal Raman Imaging
• Hyperspectral image generation
• Excellent lateral resolution
• Depth resolution ideally suited for 3D image generation and depth profiles
• Ultra-fast Raman imaging option with under one millisecond integration time per spectrum
• Ultra-high throughput spectroscopic system for best sensitivity and spectral resolution
• Non-destructive imaging technique: no staining of fixation of the sample required
• 3 excitation wavelengths, 488, 532, 785 nm
• Can do mapping of PL as well

Optical Profilometry

• Wyko NT 9100 optical profilometer
• Vertical Measurement Range: 0.1nm to 1mm
• Vertical Resolution: 1< 1Å
• RMS Repeatability: 20.01nm
• Vertical Scan Speed: up to 7.2μm/sec
• Lateral Spatial Sampling: 0.08 to 13.1μm
• Field- of –View: 8.24mm to 0.05mm