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TRI Austin has trained and certified in-house experts and equipment for surface examination, including Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), Optical Stereo Microscopy, Focussed Ion Beam Scanning Electron Microscopy, Micro-Raman Spectrometry, and Optical Profilometry.  These personnel and equipment are available as surface examination services in addition to being used for in-house needs.

Surface Examination Capabilities

  • TRI Austin’s surface examination capabilities include:
  • Scanning Electron Microscopy (SEM)
  • Atomic Force Microscopy (AFM)
  • Optical Stereo Microscopy
  • Focussed Ion Beam Scanning Electron Microscopy
  • Micro-Raman Spectrometry
  • Optical Profilometry

Scanning Electron Microscope (SEM)

  • Jeol 6390 SEM
  • Magnification ~300,000x
  • Resolution of ~1nm
  • Specimen chamber: Up to 6” diameter
  • Auto focus/auto stigmator, auto gun (saturation, bias, and alignment), and automatic contrast and brightness
  • EDAX Element EDS with 30mm detector crystal

Atomic Force Microscope (AFM)

  • Park Scientific AutoProbe CP-R AFM
  • Manual XY stage and motorized Z stage
  • 5 microns scanner
  • 100 micrometers piezo scanner with a maximum vertical range of 2.5 microns
  • Operates in contact and LFM mode , also tapping mode, and other AC techniques
  • Coated Sharpened Microlevers  MSCT-MT-A sensors


  • Olympus BX51 Microscope
  • Vertical stage movement: 25mm stage stroke with coarse adjustment limit stopper
  • Torque adjustment for coarse adjustment knobs
  • Stage mounting position variable
  • High sensitivity fine focusing knob (minimum adjustment gradations: 1μm
  • Built-in Koehler illumination for transmitted light
  • 12V100W halogen bulb (pre-centered) Built-in filters (LBD-IF, ND6, ND25 optional)

Optical Stereomicroscope

  • Leica M205A Stereomicroscope
  • Fully automated
  • 16:1 Zoom
  • Structural detail resolution down to 476nm
  • Numerical aperture of 0.35
  • Resolution down one micrometer with 61.55mm working distance
  • Indexed stage allows large area stitching and precise position measurements

Focussed Ion Beam Scanning Electron Microscopy

  • Scios 2 HiVac FIB/SEM with EBL
  • Resolution:  0.8 nm at 30keV in STEM
  • Voltage:  200eV to 30 keV
  • Current: 1 pA to 400nA
  • Stage: 110 x110 mm with 65 mm z-travel, 360° rotation,
    -15° to 90° tilt
  • NICol SEM column with Shottky emitter source
  • Can do FIB milling of samples
  • EDS and EBSD detectors

Micro-Raman Spectrometry

  • Witec Alpha 300 Raman Spectrometer
  • Confocal Raman Imaging
  • Hyperspectral image generation
  • Excellent lateral resolution
  • Depth resolution ideally suited for 3D image generation and depth profiles
  • Ultra-fast Raman imaging option with under one millisecond integration time per spectrum
  • Ultra-high throughput spectroscopic system for best sensitivity and spectral resolution
  • Non-destructive imaging technique: no staining of fixation of the sample required
  • 3 excitation wavelengths, 488, 532, 785 nm
  • Can do mapping of PL as well

Optical Profilometry

  • Wyko NT 9100 optical profilometer
  • Vertical Measurement Range: 0.1nm to 1mm
  • Vertical Resolution: 1< 1Å
  • RMS Repeatability: 20.01nm
  • Vertical Scan Speed: up to 7.2μm/sec
  • Lateral Spatial Sampling: 0.08 to 13.1μm
  • Field- of –View: 8.24mm to 0.05mm

Capability Statement

Contact Person

Doyle Motes, P.E.
NDE Division Director

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